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TFE   Srl, is a specialist supplier of PVD, or sputter deposition equipment. We have an extensive product portfolio from which, a variety of system types can be supplied.  Together with our network of service and processes engineers, we are well positioned to support a comprehensive range of process applications. Our equipment portfolio includes:

Batch sputter systems

TFE is the sole European representative of KDF, Electronic and Vacuum Services Inc.. KDF produces a complete range of in-line batch sputter equipment, including vertical and horizontal configurations. The product range suuporty a wide variety of process applications, and includes systems that can deposit on to large area substrates. 

Remanufactured MRC Eclipse systems

The Eclipse is an advanced multi-metal sputtering production tool, capable of depositing high quality VLSI film stacks. The system is configured with sputter etch, and three independent sputtering chambers, to support both metal and reactive sputtering modes. A proven production work horse, and lower cost of ownership than any similar system. TFE specializes in sourcing, remanufacturing, and the re-supply of these systems.

Remanufactured MRC batch systems

TFE has a comprehensive program for re-supplying, refurbishing, and remanufacturing MRC batch sputter systems. The systems can be supplied a-is, or re-configured to a specific application requirement.

Custom UHV systems

We also represent Kenotec Srl, who specialize in the design and manufacture of systems to individual customer requirements. Systems and be load-locked, with single, or multi-chamber configurations, which can also include Sputter Etch and CVD capability.

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