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TFE srl can supply and provide full support for re-manufactured systems originally supplied by Lam Reasearch.

The support programme is comprehensive and includes:

•   Auditing, decommissioning, relocation
•   Refurbishment
•   Troubleshooting and repair
•   Training

Refurbishment is performed in the Netherlands and includes; de-commisioning (where applicable), remanufacturing, installation, hardware and process start-up, as follows:

A refurbishing project typically includes:

• Audit with Configuration & status report
• Decommission, Crating, shipping to our plant
• Strip down to frame
• Refurbish all main sub-assembly with test and QC
• Install all components & assy, meet STD OEM specs
• Tool complete QC according to STD OEM specs
• Tool complete ATP according to STD OEM specs
• Decommission, crate&ship to customer site
• Installation at the customer site
• Process start-up
• Process support and integration
• Final acceptance by customer
• Warranty start
• All above according to SEMI standards
• Post warranty support (if required)

The programme covers, with service and process support:

• Plasma Etching (Lam Rainbow all models)
• Plasma Etching (Alliance)
• Dielectric Etching (All Lam Models)
• Plasma Etching of metals ( Rainbow+ Alliance)

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