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The Eclipse is an advanced multi-metal sputtering production tool, capable of depositing high quality VLSI film stacks. The system is configured with sputter etch, and three independent UHV sputter chambers to support both metal and reactive sputtering modes. The cathodes are high performance rotating magnet DC magnetrons capable of producing very uniform films. The system has an ergonomic wafer handler with field proven robotics. A production work horse, the system delivers a throughput performance up to 54 wafers per hour, and lower cost of ownership than any similar tool. TFE specializes in sourcing, remanufacturing, and the re-supply of these systems. System refurbishment includes the following features:

ECLIPSE REFURBISHMENT

ECLIPSE PRE-REDUX REMANUFACTURING
1 All cryo pumps removed and refurbished by Helix Technology (CTI) 
 2 Gate valves cleaned and re-registered as required 
 3 Throttle valves cleaned and calibrated 
 4 Ion gauges and seal o-rings replaced (New) 
 5 Seal Rings replaced (As required) 
 6 Rough valves refurbished 
 7 Cryo compressors adsorbers changed (New) 
 8 Replace burnt CRT monitors (As required) 
 9 Install Quick cool if not on system 
    (As required) 
10 Clean/replace water flow meters and
      indicators  (As required) 
11 Clean/replace water lines (As required) 
12 Replace chaffed or damaged pneumatic lines 
     (As required) 
13 Add water drain lines to all cathodes 
     (As required) 
14 Replace missing or damaged panels 
15 System configuration to new owners
      requirements
  a.       Type of back plane
   b.       Type of wafer holders
   c.       Cathode type
   d.       Bias options
   e.       Hard/Soft Etch
   f.        Reactive gas options
   g.       CTI onboard upgrade available
   h.       Water pump upgrade on plenum available
16 Full system calibration and alignment 
17 All functions fully tested 
18 Vacuum performance verified to OEM
      original specification.

In addition to normal refurbishment, the
following items are completed: 
 1 Remove old style front end 
 2 Remove old analogue electronics rack 
 3 Remove stepper panel assembly 
 4 Remove old style backside gas from all chambers 
 5 Remove old style RF tune networks 
 6 Rework electronic cabinet 
 7 Disassemble three towers and build two towers with new breakers/contactors 
 8 Bench test DC power supplies prior to install in towers 
 9 Rework electronics rack power and
    distribution assembly 
10 Install front end sub frame (New) 
11 Install analogue electronics rack (New) 
12 Install back plane gas valves (New) 
13 Install upgraded RF networks in Etch/Bias
     (at required positions) New motors 
14 Install process control PCB's (New) 
15 Install stepper panel (New) 
16 Install index control PCB (New) 
17 Install transfer arm control PCB (New) 
18 Add New digital I/O 
19 Add New DC Interconnect Box 
20 Rework old style air manifold 
21 Install New heater safety breaker 
22 Install New front end laminar flow blowers and filters 
23 Install New clear front doors 
24 Rework remote monitor install manual drive pot 25
25 Replace remote monitor wooden table with SS
 

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